Reactor Parameters

• MW Power - 30 kW
• MW Frequency - 915 MHz
• Bell Jar Diameter – 10” (25 cm)
• Sample Holder Diameter – 6” (15 cm)
• Water Cooled Stage
• Optional Bias Voltage
• Temperature Control by IR-Pyrometer
• Optical Emission Spectroscopy Control
• Capable for long deposition hours

Diamond Coated Tooling

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